Formation mechanism of ZnSiO(3) nanoparticles embedded in an amorphous interfacial layer between a ZnO thin film and an n-Si (001) substrate due to thermal treatment

Abstract

The x-ray diffraction patterns, transmission electron microscopy images, and selected-area electron diffraction patterns for the ZnO/Si heterostructures annealed at 900 degrees C showed that orthorhombic ZnSiO(3) nanoparticles were formed in the amorphous layer between the ZnO film and the Si substrate, resulting from the interdiffusion between the ZnO film and the Si substrate due to thermal treatment. Auger electron spectroscopy depth profiles for the ZnO/Si heterostructures annealed at 900 degrees C demonstrated the formation of amorphous Zn(2x)Si(1-x)O(2), an interfacial layer. A formation mechanism for the orthorhombic ZnSiO(3) nanoparticles embedded in the amorphous Zn(2x)Si(1-x)O(2) layer is described on the basis of the experimental results. (c) 2008 American Institute of Physics.