다양한 산화물 기판 위에 RF 마그네트론 스퍼터링 방법으로 성장된 ZnO 박막의 특성 비교Comparison on Properties of ZnO Thin Films Grown by RF Magnetron Sputtering on Various Oxide Substrates
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정철원 | ko |
| dc.contributor.author | 한석규 | ko |
| dc.contributor.author | 최준호 | ko |
| dc.contributor.author | 홍순구 | ko |
| dc.contributor.author | 조형균 | ko |
| dc.contributor.author | 송정훈 | ko |
| dc.contributor.author | 이정용 | ko |
| dc.contributor.author | 이재욱 | ko |
| dc.date.accessioned | 2013-03-06T20:29:03Z | - |
| dc.date.available | 2013-03-06T20:29:03Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2007-04 | - |
| dc.identifier.citation | 전기전자재료학회논문지, v.20, no.4, pp.289 - 293 | - |
| dc.identifier.issn | 1226-7945 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/88362 | - |
| dc.language | Korean | - |
| dc.publisher | 한국전기전자재료학회 | - |
| dc.title | 다양한 산화물 기판 위에 RF 마그네트론 스퍼터링 방법으로 성장된 ZnO 박막의 특성 비교 | - |
| dc.title.alternative | Comparison on Properties of ZnO Thin Films Grown by RF Magnetron Sputtering on Various Oxide Substrates | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 20 | - |
| dc.citation.issue | 4 | - |
| dc.citation.beginningpage | 289 | - |
| dc.citation.endingpage | 293 | - |
| dc.citation.publicationname | 전기전자재료학회논문지 | - |
| dc.identifier.kciid | ART001049946 | - |
| dc.contributor.localauthor | 이정용 | - |
| dc.contributor.nonIdAuthor | 정철원 | - |
| dc.contributor.nonIdAuthor | 한석규 | - |
| dc.contributor.nonIdAuthor | 최준호 | - |
| dc.contributor.nonIdAuthor | 홍순구 | - |
| dc.contributor.nonIdAuthor | 조형균 | - |
| dc.contributor.nonIdAuthor | 송정훈 | - |
| dc.contributor.nonIdAuthor | 이재욱 | - |
| dc.subject.keywordAuthor | Oxide substrate | - |
| dc.subject.keywordAuthor | ZnO film | - |
| dc.subject.keywordAuthor | RF magnetron sputtering | - |
| dc.subject.keywordAuthor | Oxide substrate | - |
| dc.subject.keywordAuthor | ZnO film | - |
| dc.subject.keywordAuthor | RF magnetron sputtering | - |
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