In this paper for the first time, a novel physical structure of planar spiral inductors fabricated on a multilayered Bragg reflector is proposed. The multilayered Bragg reflector (BR) was fabricated oil Si substrate. The effects of the multilayered Bragg reflector and inductor patterns on the characteristics of inductors art studied. The results show, that the inductor fabricated on the Bragg reflector result in a significant improvement in terms of the S-11-parameter. This approach seems highly feasible and promising for future Si-based RF IC applications. (c) 2006 Wiley Periodicals, Inc.