새로운 HAR-MEMS 공정 연구와 그를 이용한 미세 열유체 및 바이오 응용 연구

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Publisher
한국전기전자재료학회
Issue Date
2005
Language
Korean
Citation

전기전자재료, v.18, no.4, pp.12 - 18

ISSN
1226-7937
URI
http://hdl.handle.net/10203/87887
Appears in Collection
ME-Journal Papers(저널논문)
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