Influence of Pt bottom electrodes on orientation of Pb(Sc1/2Nb1/2)O-3-PbTiO3 thin films

Abstract

Orientation changes in sol-gel derived (40%)Pb(Sc1/2Nb1/2)O-3- (60%)PbTiO3 (PSNT(40/60)) thin films on two different kinds of Pt bottom electrodes were investigated. PSNT thin films grown on the Pt/TiO2/SiO2/Si substrate with a high degree of (111) Pt preferred orientation showed predominant (100) orientation while the others on the Pt/Ti/SiO2/Si substrate with a lesser degree of (I 11) preferred orientation had random orientation. The effects of these two different substrates were shown through the crystallographic orientation of the films in correlation with the microstructure and orientation of Pt-bottom-electrode.