DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kwon, MS | ko |
dc.contributor.author | Lee, JeongYong | ko |
dc.date.accessioned | 2013-03-06T04:52:11Z | - |
dc.date.available | 2013-03-06T04:52:11Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-02 | - |
dc.identifier.citation | APPLIED SURFACE SCIENCE, v.207, pp.158 - 168 | - |
dc.identifier.issn | 0169-4332 | - |
dc.identifier.uri | http://hdl.handle.net/10203/85856 | - |
dc.description.abstract | Thermodynamic calculations of the equilibrium compositions of condensed- and gaseous-reaction products from the reaction between Cu(s) and Cl-2(g) has been performed to understand the fundamental reactions during the Cl-based dry etching of Cu thin film. Total pressure was fixed at 5 mTorr, which is typical for high-density plasma etching. The final phase equilibrium state of Cu(s)-Cl-2(g) system was determined by using the minimization of the total free energy of the system as a function of temperature and initial Cl-2(g)/Cu(s) molar ratio, and the calculated phase equilibrium results were discussed in relation to the Cl-based Cu dry etch reaction. (C) 2002 Elsevier Science B.V. All rights reserved. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.subject | HIGH-TEMPERATURE EQUILIBRIA | - |
dc.subject | MULTIPHASE SYSTEMS | - |
dc.subject | COMPUTER-PROGRAM | - |
dc.subject | COPPER | - |
dc.subject | CHLORINE | - |
dc.subject | PLASMA | - |
dc.subject | CL-2 | - |
dc.subject | IRRADIATION | - |
dc.subject | SURFACE | - |
dc.subject | CU(100) | - |
dc.title | Thermodynamic equilibrium calculation of CU(s)-Cl-2(g) reaction | - |
dc.type | Article | - |
dc.identifier.wosid | 000181571500019 | - |
dc.identifier.scopusid | 2-s2.0-0037470434 | - |
dc.type.rims | ART | - |
dc.citation.volume | 207 | - |
dc.citation.beginningpage | 158 | - |
dc.citation.endingpage | 168 | - |
dc.citation.publicationname | APPLIED SURFACE SCIENCE | - |
dc.contributor.localauthor | Lee, JeongYong | - |
dc.contributor.nonIdAuthor | Kwon, MS | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Cu | - |
dc.subject.keywordAuthor | chlorine | - |
dc.subject.keywordAuthor | reaction | - |
dc.subject.keywordAuthor | equilibrium | - |
dc.subject.keywordAuthor | phase | - |
dc.subject.keywordPlus | HIGH-TEMPERATURE EQUILIBRIA | - |
dc.subject.keywordPlus | MULTIPHASE SYSTEMS | - |
dc.subject.keywordPlus | COMPUTER-PROGRAM | - |
dc.subject.keywordPlus | COPPER | - |
dc.subject.keywordPlus | CHLORINE | - |
dc.subject.keywordPlus | PLASMA | - |
dc.subject.keywordPlus | CL-2 | - |
dc.subject.keywordPlus | IRRADIATION | - |
dc.subject.keywordPlus | SURFACE | - |
dc.subject.keywordPlus | CU(100) | - |
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