MBE-grown polycrystalline Si1-xMnx semiconductors were aged at 700degreesC for various times, and heat treatment effect on the magnetic properties was studied. Extensive analyses on the magnetization characteristics and microstructure of polycrystalline Si1-xMnx semiconductors reveal that ferromagnetic MnSi and anti-ferromagnetic Mn5Si3 phases are transformed into ferromagnetic Mn4Si7, nonmagnetic Mn5Si2, anti-ferromagnetic beta-Mn and unidentified minor phases. The phase transformation causes the decrease of saturation magnetizations after heat treatment. (C) 2004 Published by Elsevier B.V.