FeRAM 소자 제작 중에 발생하는 Pt/Al 반응 기구A Study on Pt/Al Reaction Mechanism in the FeRAM Device Integration
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 조경원 | ko |
| dc.contributor.author | 홍태환 | ko |
| dc.contributor.author | 권순용 | ko |
| dc.contributor.author | 최시경 | ko |
| dc.date.accessioned | 2013-03-04T00:20:24Z | - |
| dc.date.available | 2013-03-04T00:20:24Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004-10 | - |
| dc.identifier.citation | 한국재료학회지, v.14, no.10, pp.688 - 695 | - |
| dc.identifier.issn | 1225-0562 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/81051 | - |
| dc.language | Korean | - |
| dc.publisher | 한국재료학회 | - |
| dc.title | FeRAM 소자 제작 중에 발생하는 Pt/Al 반응 기구 | - |
| dc.title.alternative | A Study on Pt/Al Reaction Mechanism in the FeRAM Device Integration | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 14 | - |
| dc.citation.issue | 10 | - |
| dc.citation.beginningpage | 688 | - |
| dc.citation.endingpage | 695 | - |
| dc.citation.publicationname | 한국재료학회지 | - |
| dc.identifier.kciid | ART001108025 | - |
| dc.contributor.localauthor | 최시경 | - |
| dc.contributor.nonIdAuthor | 조경원 | - |
| dc.contributor.nonIdAuthor | 홍태환 | - |
| dc.contributor.nonIdAuthor | 권순용 | - |
| dc.subject.keywordAuthor | FeRAM | - |
| dc.subject.keywordAuthor | Pt/Al interface | - |
| dc.subject.keywordAuthor | FeRAM | - |
| dc.subject.keywordAuthor | Pt/Al interface | - |
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