Self-assembled interconnection by bamboo-like carbon nanotubes

Abstract

Carbon nanotubes (CNTs) could be formed on Si substrate using nickel catalyst under microwave plasma-enhanced chemical vapor deposition system. Under the high, negative-bias voltage (- 400 V) condition, we found the formation of the carbon nanotube islands and the bamboo-like carbon nanotube interconnection lines. Most of the bamboo-like carbon nanotubes connected with the carbon nanotubes themselves, which indicates the self-assembled characteristics of the carbon nanotube interconnection lines. The self-assembled characteristics of the bamboo-like carbon nanotube interconnection lines were evaluated using computer-aided image analysis. (C) 2003 Elsevier B.V. All rights reserved.