An audio frequency filter application of micromachined thermally-isolated diaphragm structures

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This paper reports a new application of micromachined thermally-isolated diaphragm structures for audio frequency filters. A pair of electrothermal elements that consist of a heater and a temperature sensor integrated in the same dielectric diaphragm have been used as a basic filter component. The electrothermal response of the diaphragm structure has one-pole, low-pass filtering characteristics. Various filter configurations using the fabricated electrothermal structures with driving circuitry have been tested. Measured responses of the filters show that cut-off frequencies can be electrically tuned, ranging from 30 to 300 Hz. Design parameters and guidelines have been identified and analyzed with respect to filter characteristics. The results have demonstrated the possibility that the thermally-isolated diaphragm structures can be used for audio frequency filter applications. (C) 2001 Elsevier Science B.V. All rights reserved.
Publisher
ELSEVIER SCIENCE SA
Issue Date
2001-03
Language
English
Article Type
Article
Citation

SENSORS AND ACTUATORS A-PHYSICAL, v.89, no.1-2, pp.49 - 55

ISSN
0924-4247
DOI
10.1016/S0924-4247(00)00539-2
URI
http://hdl.handle.net/10203/80679
Appears in Collection
RIMS Journal Papers
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