복셀 차감법에 의한 나노 복화(複畵)공정 정밀화Development of Contour Offset Algorithm(COA) in nRP Process for Fabricating Nano-precision Features

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In this study, a new algorithm, named as Contour Offset Algorithm(COA) is developed to fabricate precise features or patterns in the range of several micrometers by nano replication printing(nRP) process. In the nRP process, a femto-second laser is scanned on a photosensitive monomer resin in order to induce polymerization of the liquid monomer according to a voxel matrix which is transformed from the bitmap format file. After polymerization, a droplet of ethanol is dropped to remove the unnecessary remaining liquid resin and then only the polymerized figures with nano-scaled precision are remaining on the glass plate. To obtain more precise replicated features, the contour lines in voxel matrix should be modified considering a voxel size. In this study, the efficiency of the proposed method is shown through two examples in view of accuracy.
Publisher
한국정밀공학회
Issue Date
2004-06
Language
Korean
Citation

한국정밀공학회지, v.21, no.6, pp.160 - 166

ISSN
1225-9071
URI
http://hdl.handle.net/10203/80616
Appears in Collection
ME-Journal Papers(저널논문)
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