DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, C | ko |
dc.contributor.author | Lee, C | ko |
dc.contributor.author | Liu, JY | ko |
dc.contributor.author | Jeon, Y | ko |
dc.contributor.author | No, Kwangsoo | ko |
dc.date.accessioned | 2013-03-03T21:18:37Z | - |
dc.date.available | 2013-03-03T21:18:37Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2001 | - |
dc.identifier.citation | INTEGRATED FERROELECTRICS, v.35, no.1-4, pp.1741 - 1752 | - |
dc.identifier.issn | 1058-4587 | - |
dc.identifier.uri | http://hdl.handle.net/10203/80488 | - |
dc.description.abstract | In this study, we fabricated the PZT/TiOx/SiO2/SiNx/SiO2/Si structure for acousto-optic (AO) device applications using the interaction of surface acoustic wave (SAW) and optical beam. SAW was generated using the inter-digital transducer (IDT) on PZT film, and optical beam (He-Ne laser) was guided in SiNx film using prism-coupling method. Two SiO2 layers were used for optical cladding layer, and TiOx for the buffer layer to prevent the inter-diffusion between PZT and SiO2 layers. In this structure, we measured insertion loss of -7dB at minimum point, resonance frequency of 17.6 MHz and sound wave velocity of 8800 m/s under impedance matching condition. We also measured optical propagation loss of the SiNx-film in both SiNx/SiO2/Si and PZT/TiOx/SiO2/SiNx/SiO2/Si structure for confirming the applicability of SiNx film to the waveguide layer. | - |
dc.language | English | - |
dc.publisher | TAYLOR FRANCIS LTD | - |
dc.subject | WAVE | - |
dc.title | Fabrication and characterization of PZT/TiO(x)/SiO(2)/SiN(x)/SiO(2)/Si structure for acousto-optic device applications | - |
dc.type | Article | - |
dc.identifier.wosid | 000167524700003 | - |
dc.identifier.scopusid | 2-s2.0-0035027437 | - |
dc.type.rims | ART | - |
dc.citation.volume | 35 | - |
dc.citation.issue | 1-4 | - |
dc.citation.beginningpage | 1741 | - |
dc.citation.endingpage | 1752 | - |
dc.citation.publicationname | INTEGRATED FERROELECTRICS | - |
dc.contributor.localauthor | No, Kwangsoo | - |
dc.contributor.nonIdAuthor | Lee, C | - |
dc.contributor.nonIdAuthor | Lee, C | - |
dc.contributor.nonIdAuthor | Liu, JY | - |
dc.contributor.nonIdAuthor | Jeon, Y | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | acousto-optic device | - |
dc.subject.keywordAuthor | surface acoustic wave | - |
dc.subject.keywordAuthor | insertion loss | - |
dc.subject.keywordAuthor | optical propagation loss | - |
dc.subject.keywordPlus | WAVE | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.