2단계 증착법으로 제조된 Pb(Zr,Ti)O3 압전 박막의 전기적 특성 및 잔류 응력에 관한 연구The Electrical Properties and Residual Stress of Pb(Zr,Ti)O₃ Piezoelectric Thin Films fabricated by 2- Step Deposition Method
- Publisher
- 한국재료학회
- Issue Date
- 2001-09
- Language
- Korean
- Citation
한국재료학회지, v.11, no.9, pp.769 - 775
- ISSN
- 1225-0562
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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