DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kweon, SY | ko |
dc.contributor.author | Yi, SH | ko |
dc.contributor.author | Choi, Si-Kyung | ko |
dc.date.accessioned | 2013-03-03T08:05:13Z | - |
dc.date.available | 2013-03-03T08:05:13Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1997-01 | - |
dc.identifier.citation | JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.15, no.1, pp.57 - 61 | - |
dc.identifier.issn | 0734-2101 | - |
dc.identifier.uri | http://hdl.handle.net/10203/77893 | - |
dc.description.abstract | Highly c-axis oriented lead titanate (PbTiO3) thin film, having a perovskite structure, was prepared on magnesium oxide (MgO) (100) single crystal using multiple cathode dc-magnetron sputtering at 600 degrees C. The film was annealed at 700 degrees C for up to 8 h. Both the c-axis orientation ratio P and c-axis lattice parameter of the film decreased with the increase of the annealing time. It was confirmed that the decrease of the c-axis lattice parameter with the annealing time was due to the relaxation of the intrinsic stress generated during deposition. These experimental results suggested that P was related to the intrinsic stress. The film deposited at various working pressures was examined in detail to confirm the intrinsic stress effect of P. P of 95% at 8 mTorr decreased to 60% at 70 mTorr. The pressure dependence of P was explained by the intrinsic stress change. Regardless of the sputtering condition, all P's were reduced to 40% after annealing at 700 degrees C for 8 h. The difference in P between the before and after annealing was caused by the relaxation of the intrinsic stress. It was supposed that the remaining 40% of P after the heat treatment was caused, in the most part, by the ferroelectric phase transition. (C) 1997 American Vacuum Society. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | PYROELECTRIC PROPERTIES | - |
dc.subject | DOMAIN FORMATION | - |
dc.subject | ORIGIN | - |
dc.title | Intrinsic stress dependence of c-axis orientation ratio in PbTiO3 thin films deposited by reactive sputtering | - |
dc.type | Article | - |
dc.identifier.wosid | A1997WD69000011 | - |
dc.identifier.scopusid | 2-s2.0-0031538720 | - |
dc.type.rims | ART | - |
dc.citation.volume | 15 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 57 | - |
dc.citation.endingpage | 61 | - |
dc.citation.publicationname | JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS | - |
dc.contributor.localauthor | Choi, Si-Kyung | - |
dc.contributor.nonIdAuthor | Kweon, SY | - |
dc.contributor.nonIdAuthor | Yi, SH | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | PYROELECTRIC PROPERTIES | - |
dc.subject.keywordPlus | DOMAIN FORMATION | - |
dc.subject.keywordPlus | ORIGIN | - |
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