Effects of sol-gel processing variables on the texture growth of LiNbO3 thin film

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Highly oriented lithium niobate (LiNbO3) thin films were fabricated usiIlg the sol-gel spill coating method. The effects of the sol-gel processing variables, such as reflux time, crystallization temperature and substrate, on tile development of texture on the thin film were investigated. The film made from tile solution refluxed. for 5 h and deposited on a sapphire (012) substrate should highly oriented growth at the crystallization temperature of 500 degrees C. The film had homogeneous and pore-free microstructure. The film made from the solution refluxed for 1 h showed only preferred orientation and porous microstructure under the same processing conditions. The thin films deposited on MgO(100) substrates were polycrystalline. The crystallization temperature and the film thickness significantly affected the crystallinity and the orientation of the films.
Publisher
JAPAN J APPLIED PHYSICS
Issue Date
1996-01
Language
English
Article Type
Article
Citation

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.35, no.1A, pp.210 - 215

ISSN
0021-4922
DOI
10.1143/JJAP.35.210
URI
http://hdl.handle.net/10203/75994
Appears in Collection
MS-Journal Papers(저널논문)
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