AES를 이용한 정량분석에서 Matrix 효과에 대한 보정 - 몇가지 Silicide와 RuO2 박막의 경우-Corrections for the Matrix Effects in Quantitative Analysis by Auger Electron Spectroscopy-Applications to Selected Silicides and RuO2 Films

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Publisher
한국물리학회
Issue Date
1995-12
Language
English
Citation

새물리, v.35, no.2, pp.230 - 237

ISSN
0374-4914
URI
http://hdl.handle.net/10203/74586
Appears in Collection
MS-Journal Papers(저널논문)
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