DC Field | Value | Language |
---|---|---|
dc.contributor.author | Roh, DW | ko |
dc.contributor.author | Yun, SJ | ko |
dc.contributor.author | Kim, K | ko |
dc.contributor.author | Choi, JS | ko |
dc.contributor.author | Choo, Woong Kil | ko |
dc.date.accessioned | 2013-03-02T15:55:36Z | - |
dc.date.available | 2013-03-02T15:55:36Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1997-07 | - |
dc.identifier.citation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.31, no.1, pp.135 - 139 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.uri | http://hdl.handle.net/10203/74290 | - |
dc.description.abstract | Single-crystal GaAs films were grown on semi-insulating GaAs (100) at substrate temperatures below 200 degrees C by using ionized source beam epitaxy. The correlation between the properties of the films and the growth parameters, in particular, the substrate temperature, the amount of As-source beam ionization, and the acceleration voltage of the As beam was investigated to elucidate the possible benefits of source beam ionization and acceleration on low-temperature thin film growth. The use of ionized and accelerated As-source beam greatly improved the quality of the low-temperature grown GaAs film, The surface morphology, crystallinity, and microstructure of the low temperature grown GaAs films were evaluated using in-situ reflection high energy electron diffraction, double crystal X-ray diffraction, and cross section transmission electron microscopy. | - |
dc.language | English | - |
dc.publisher | KOREAN PHYSICAL SOC | - |
dc.title | Effect of ionization and acceleration of As-source beam on structural properties of low temperature grown GaAs | - |
dc.type | Article | - |
dc.identifier.wosid | A1997XL06300034 | - |
dc.type.rims | ART | - |
dc.citation.volume | 31 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 135 | - |
dc.citation.endingpage | 139 | - |
dc.citation.publicationname | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.contributor.nonIdAuthor | Roh, DW | - |
dc.contributor.nonIdAuthor | Yun, SJ | - |
dc.contributor.nonIdAuthor | Kim, K | - |
dc.contributor.nonIdAuthor | Choi, JS | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordPlus | EPITAXY | - |
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