The measurement of electro-optic coefficient of PZT thin films dried at different temperatures using two-beams polarization interferometer

Abstract

PZT thin films are fabricated on ITO/glass substrates using MOD method. The main processing variable is drying temperature for pyrolysis as 200, 350 and 470 degrees C. The crystallization, microstructure and electric properties are measured. The two-beams polarization interferometer is used for the electro-optic coefficients of the thin films.