We report a novel method for creating many different complex
structures from a single prepattern that is either prepared
from a master mold or stamped onto a solid substrate by patterning
with a poly(dimethylsiloxane) (PDMS) replica mold.
We show that various metal patterns including ellipses, dots,
rings, chains of dots (or rings), ribbons, and wavy lines with
various feature sizes can be generated from a single pattern of
isolated ellipsoidal dots by simply varying the residual polymer
film thickness and the reactive ion etching (RIE) time.