저압화학증착된 혼합상 실리콘 박막의 형성기구에 관한 투과전자현미경 연구Transmission Electron Microscopy Study on the Formation Mechanism of the As-Deposited Mixed-Phase LPCVD Silicon Thin Films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김진혁 | ko |
| dc.contributor.author | 이정용 | ko |
| dc.contributor.author | 이승창 | ko |
| dc.contributor.author | 남기수 | ko |
| dc.date.accessioned | 2013-03-02T13:55:10Z | - |
| dc.date.available | 2013-03-02T13:55:10Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995-12 | - |
| dc.identifier.citation | 대한금속·재료학회지, v.33, no.6, pp.730 - 736 | - |
| dc.identifier.issn | 1738-8228 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/73848 | - |
| dc.language | Korean | - |
| dc.publisher | 대한금속재료학회 | - |
| dc.title | 저압화학증착된 혼합상 실리콘 박막의 형성기구에 관한 투과전자현미경 연구 | - |
| dc.title.alternative | Transmission Electron Microscopy Study on the Formation Mechanism of the As-Deposited Mixed-Phase LPCVD Silicon Thin Films | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 33 | - |
| dc.citation.issue | 6 | - |
| dc.citation.beginningpage | 730 | - |
| dc.citation.endingpage | 736 | - |
| dc.citation.publicationname | 대한금속·재료학회지 | - |
| dc.contributor.localauthor | 이정용 | - |
| dc.contributor.nonIdAuthor | 김진혁 | - |
| dc.contributor.nonIdAuthor | 이승창 | - |
| dc.contributor.nonIdAuthor | 남기수 | - |
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