감압화학증착의 이단계 성장으로 실리콘 기판 위에 증착한 in-situ 인 도핑 다결정 실리콘 박막의 미세구조 조절Manipulation of Microstructures of in-situ Phosphorus-Doped Poly Silicon Films Deposited on Silicon Substrate Using Two Step Growth of Reduced Pressure Chemical Vapor Deposition
- Publisher
- 한국전기전자재료학회
- Issue Date
- 2000-12
- Language
- Korean
- Citation
전기전자재료학회논문지 , v.13, no.2, pp.95 - 100
- ISSN
- 1226-7945
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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