DC Field | Value | Language |
---|---|---|
dc.contributor.author | Nae-In Lee | ko |
dc.contributor.author | Jin-Woo Lee | ko |
dc.contributor.author | Sung-Hoi Hur | ko |
dc.contributor.author | Hyung-Sub Kim | ko |
dc.contributor.author | Chul-Hi Han | ko |
dc.date.accessioned | 2013-02-28T04:39:33Z | - |
dc.date.available | 2013-02-28T04:39:33Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1997-10 | - |
dc.identifier.citation | IEEE ELECTRON DEVICE LETTERS, v.18, no.10, pp.486 - 488 | - |
dc.identifier.issn | 0741-3106 | - |
dc.identifier.uri | http://hdl.handle.net/10203/72815 | - |
dc.description.abstract | Highly reliable inter-polysilicon oxide (polyoxide) for nonvolatile memory applications has been achieved using electron cyclotron resonance (ECR) N2O-plasma, It is demonstrated that the N2O-plasma polyoxide grown on doped poly-Si has a low leakage current and high breakdown field due to a smooth polyoxide/poly-Si interface and nitrogen incorporation during oxidation, Moreover, the polyoxide has much less electron trapping and over one order larger charge-to-breakdown (Q(bd)) up to 10 C/cm(2) than thermal polyoxide. The N2O-plasma polyoxide can be a good choice for interpoly dielectric of nonvolatile memories. | - |
dc.language | English | - |
dc.publisher | IEEE-Inst Electrical Electronics Engineers Inc | - |
dc.subject | PERFORMANCE | - |
dc.title | Highly Reliable Polysilicon Oxide Grown by Electron Cyclotron Resonance Nitrous Oxide Plasma | - |
dc.type | Article | - |
dc.identifier.wosid | A1997XX23700008 | - |
dc.identifier.scopusid | 2-s2.0-0031257842 | - |
dc.type.rims | ART | - |
dc.citation.volume | 18 | - |
dc.citation.issue | 10 | - |
dc.citation.beginningpage | 486 | - |
dc.citation.endingpage | 488 | - |
dc.citation.publicationname | IEEE ELECTRON DEVICE LETTERS | - |
dc.contributor.localauthor | Chul-Hi Han | - |
dc.contributor.nonIdAuthor | Nae-In Lee | - |
dc.contributor.nonIdAuthor | Jin-Woo Lee | - |
dc.contributor.nonIdAuthor | Sung-Hoi Hur | - |
dc.contributor.nonIdAuthor | Hyung-Sub Kim | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | PERFORMANCE | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.