DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, EC | ko |
dc.contributor.author | Yoon, Jun-Bo | ko |
dc.contributor.author | Yoon, E | ko |
dc.date.accessioned | 2013-02-28T04:13:16Z | - |
dc.date.available | 2013-02-28T04:13:16Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1998-12 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.37, no.12B, pp.7124 - 7128 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | http://hdl.handle.net/10203/72719 | - |
dc.description.abstract | This paper reports an integrated inductor-capacitor (LC) resonator structure fabricated using bulk micromachining and anodic bonding technologies. In this resonator structure, pressure change monitored by a capacitive pressure sensor results in the change of resonance frequency. The resonance frequency shift is detected by inductive coupling from an external transmission coil; therefore, pressure can be monitored remotely using the passive LC resonator. The fabricated device size measures 3 mm x 3 mm x 0.6 mm. and pressure responsivity has been estimated to be 2 MHz/mmHg. This micromachined, hermetically sealed structure is suitable for biomedical applications such as intraocular, cardiovascular and brain pressure monitoring. | - |
dc.language | English | - |
dc.publisher | JAPAN J APPLIED PHYSICS | - |
dc.title | Hermetically sealed inductor-capacitor (LC) resonator for remote pressure monitoring | - |
dc.type | Article | - |
dc.identifier.wosid | 000078699200092 | - |
dc.identifier.scopusid | 2-s2.0-0000298124 | - |
dc.type.rims | ART | - |
dc.citation.volume | 37 | - |
dc.citation.issue | 12B | - |
dc.citation.beginningpage | 7124 | - |
dc.citation.endingpage | 7128 | - |
dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.contributor.localauthor | Yoon, E | - |
dc.contributor.nonIdAuthor | Park, EC | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | integrated LC resonator | - |
dc.subject.keywordAuthor | bulk micromachining | - |
dc.subject.keywordAuthor | anodic bonding | - |
dc.subject.keywordAuthor | wireless pressure sensor | - |
dc.subject.keywordAuthor | inductive coupling | - |
dc.subject.keywordAuthor | hermetically sealed | - |
dc.subject.keywordAuthor | inductor | - |
dc.subject.keywordAuthor | electroplating | - |
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