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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Journal Papers(저널논문)

Direct observation of Si lattice strain and its distribution in the Si(001)-SiO2 interface transition layer

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dc.contributor.authorKim, YPko
dc.contributor.authorChoi, Si-Kyungko
dc.contributor.authorKim, HKko
dc.contributor.authorMoon, DWko
dc.date.accessioned2013-02-28T04:01:51Z-
dc.date.available2013-02-28T04:01:51Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1997-12-
dc.identifier.citationAPPLIED PHYSICS LETTERS, v.71, no.24, pp.3504 - 3506-
dc.identifier.issn0003-6951-
dc.identifier.urihttp://hdl.handle.net/10203/72679-
dc.description.abstractIn the transition layer of the Si(001)-SiO2 interface, Si lattice strain and its distribution were directly observed by medium energy ion scattering spectroscopy for thermal and ion beam oxides. The strain was in the vertical direction, and the maximum values at the SiO2 side of the transition layer were 0.96% and 2.8% for the thermal and ion beam oxides, respectively. (C) 1997 American Institute of Physics. [S0003-6951(97)00750-X].-
dc.languageEnglish-
dc.publisherAMER INST PHYSICS-
dc.subjectENERGY ION-SCATTERING-
dc.subjectSI-SIO2 INTERFACE-
dc.subjectOXIDATION-
dc.subjectGENERATION-
dc.subjectMECHANISM-
dc.subjectSURFACE-
dc.titleDirect observation of Si lattice strain and its distribution in the Si(001)-SiO2 interface transition layer-
dc.typeArticle-
dc.identifier.wosidA1997YL27300014-
dc.identifier.scopusid2-s2.0-0000437892-
dc.type.rimsART-
dc.citation.volume71-
dc.citation.issue24-
dc.citation.beginningpage3504-
dc.citation.endingpage3506-
dc.citation.publicationnameAPPLIED PHYSICS LETTERS-
dc.identifier.doi10.1063/1.120373-
dc.contributor.localauthorChoi, Si-Kyung-
dc.contributor.nonIdAuthorKim, YP-
dc.contributor.nonIdAuthorKim, HK-
dc.contributor.nonIdAuthorMoon, DW-
dc.type.journalArticleArticle-
dc.subject.keywordPlusENERGY ION-SCATTERING-
dc.subject.keywordPlusSI-SIO2 INTERFACE-
dc.subject.keywordPlusOXIDATION-
dc.subject.keywordPlusGENERATION-
dc.subject.keywordPlusMECHANISM-
dc.subject.keywordPlusSURFACE-
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