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College of Engineering(공과대학)Dept. of Nuclear and Quantum Engineering(원자력및양자공학과)NE-Journal Papers(저널논문)

Blistering Mechanism for the Crater Fromation at Ta/Si Interface by sputtering with Oxygen Ion Beam

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kyung joong kim / Jung, Kyung Hoon / il cheol jeon / dae won moon
Publisher
American Institute of Physics
Issue Date
1998
Citation

JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, v.16, pp.2919 - 2925

ISSN
0734-2101
URI
http://hdl.handle.net/10203/71997
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