DC Field | Value | Language |
---|---|---|
dc.contributor.author | kyung joong kim | ko |
dc.contributor.author | Jung, Kyung Hoon | ko |
dc.contributor.author | il cheol jeon | ko |
dc.contributor.author | dae won moon | ko |
dc.date.accessioned | 2013-02-28T01:21:08Z | - |
dc.date.available | 2013-02-28T01:21:08Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1998 | - |
dc.identifier.citation | JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, v.16, pp.2919 - 2925 | - |
dc.identifier.issn | 0734-2101 | - |
dc.identifier.uri | http://hdl.handle.net/10203/71997 | - |
dc.publisher | American Institute of Physics | - |
dc.title | Blistering Mechanism for the Crater Fromation at Ta/Si Interface by sputtering with Oxygen Ion Beam | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 16 | - |
dc.citation.beginningpage | 2919 | - |
dc.citation.endingpage | 2925 | - |
dc.citation.publicationname | JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A | - |
dc.contributor.nonIdAuthor | kyung joong kim | - |
dc.contributor.nonIdAuthor | il cheol jeon | - |
dc.contributor.nonIdAuthor | dae won moon | - |
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