Evolution of Residual Stress in Plasma-Enhanced Chemical-Vapor-Deposited Silicon Dioxide Film Exposed to Room Air
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | young-soo park | ko |
| dc.contributor.author | june key lee | ko |
| dc.contributor.author | ilsub jung | ko |
| dc.contributor.author | soo-bong heo | ko |
| dc.contributor.author | Lee, Jai Young | ko |
| dc.date.accessioned | 2013-02-27T23:13:53Z | - |
| dc.date.available | 2013-02-27T23:13:53Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999 | - |
| dc.identifier.citation | APPLIED PHYSICS LETTERS, v.75, no.24, pp.3811 - 3813 | - |
| dc.identifier.issn | 0003-6951 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/71416 | - |
| dc.description.abstract | Considerable increase in compressive stress was observed in silicon dioxide films upon prolonged exposure to atmospheric moisture. The compressive stress change upon exposure to atmosphere consisted of a reversible change and an irreversible change. The irreversible component was found to be due to structural changes in the Si-O-Si network. The reversible change in stress is due to water molecules absorbed on walls of the pores. (C) 1999 American Institute of Physics. [S0003-6951(99)01348-0]. | - |
| dc.language | English | - |
| dc.publisher | Amer Inst Physics | - |
| dc.subject | OXIDE FILMS | - |
| dc.subject | DESORPTION | - |
| dc.subject | BEHAVIOR | - |
| dc.subject | KINETICS | - |
| dc.subject | WATER | - |
| dc.title | Evolution of Residual Stress in Plasma-Enhanced Chemical-Vapor-Deposited Silicon Dioxide Film Exposed to Room Air | - |
| dc.type | Article | - |
| dc.identifier.wosid | 000084242600025 | - |
| dc.identifier.scopusid | 2-s2.0-0000521772 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 75 | - |
| dc.citation.issue | 24 | - |
| dc.citation.beginningpage | 3811 | - |
| dc.citation.endingpage | 3813 | - |
| dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
| dc.identifier.doi | 10.1063/1.125464 | - |
| dc.contributor.nonIdAuthor | young-soo park | - |
| dc.contributor.nonIdAuthor | june key lee | - |
| dc.contributor.nonIdAuthor | ilsub jung | - |
| dc.contributor.nonIdAuthor | soo-bong heo | - |
| dc.type.journalArticle | Article | - |
| dc.subject.keywordPlus | OXIDE FILMS | - |
| dc.subject.keywordPlus | DESORPTION | - |
| dc.subject.keywordPlus | BEHAVIOR | - |
| dc.subject.keywordPlus | KINETICS | - |
| dc.subject.keywordPlus | WATER | - |
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