Defect Formation and Annealing Behavior in MeV Si Self-Implanted Silicon
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 조남훈 | ko |
| dc.contributor.author | 장기완 | ko |
| dc.contributor.author | 서경수 | ko |
| dc.contributor.author | 이정용 | ko |
| dc.contributor.author | 노재상 | ko |
| dc.date.accessioned | 2013-02-27T22:04:10Z | - |
| dc.date.available | 2013-02-27T22:04:10Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1996-12 | - |
| dc.identifier.citation | 한국재료학회지, v.6, no.7, pp.733 - 741 | - |
| dc.identifier.issn | 1225-0562 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/71100 | - |
| dc.language | Korean | - |
| dc.publisher | 한국재료학회 | - |
| dc.title | Defect Formation and Annealing Behavior in MeV Si Self-Implanted Silicon | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 6 | - |
| dc.citation.issue | 7 | - |
| dc.citation.beginningpage | 733 | - |
| dc.citation.endingpage | 741 | - |
| dc.citation.publicationname | 한국재료학회지 | - |
| dc.contributor.localauthor | 이정용 | - |
| dc.contributor.nonIdAuthor | 조남훈 | - |
| dc.contributor.nonIdAuthor | 장기완 | - |
| dc.contributor.nonIdAuthor | 서경수 | - |
| dc.contributor.nonIdAuthor | 노재상 | - |
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