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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Journal Papers(저널논문)

ELECTRON AND ION ENERGIES IN PLASMAS GENERATED BY THE ELECTRON-CYCLOTRON-RESONANCE MECHANISM

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UHM, HS / Chang, Hong-Youngresearcher / KIM, JH / SONG, SK
Publisher
AMER INST PHYSICS
Issue Date
1995-03
Language
English
Article Type
Article
Keywords

LOW-PRESSURE; BEAM; MODEL; IMPLANTATION

Citation

PHYSICS OF PLASMAS, v.2, no.3, pp.991 - 1001

ISSN
1070-664X
URI
http://hdl.handle.net/10203/70190
Appears in Collection
PH-Journal Papers(저널논문)
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