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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Journal Papers(저널논문)

ELECTRON AND ION ENERGIES IN PLASMAS GENERATED BY THE ELECTRON-CYCLOTRON-RESONANCE MECHANISM

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dc.contributor.authorUHM, HSko
dc.contributor.authorChang, Hong-Youngko
dc.contributor.authorKIM, JHko
dc.contributor.authorSONG, SKko
dc.date.accessioned2013-02-27T18:46:53Z-
dc.date.available2013-02-27T18:46:53Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1995-03-
dc.identifier.citationPHYSICS OF PLASMAS, v.2, no.3, pp.991 - 1001-
dc.identifier.issn1070-664X-
dc.identifier.urihttp://hdl.handle.net/10203/70190-
dc.languageEnglish-
dc.publisherAMER INST PHYSICS-
dc.subjectLOW-PRESSURE-
dc.subjectBEAM-
dc.subjectMODEL-
dc.subjectIMPLANTATION-
dc.titleELECTRON AND ION ENERGIES IN PLASMAS GENERATED BY THE ELECTRON-CYCLOTRON-RESONANCE MECHANISM-
dc.typeArticle-
dc.identifier.wosidA1995QK92700044-
dc.identifier.scopusid2-s2.0-5244336602-
dc.type.rimsART-
dc.citation.volume2-
dc.citation.issue3-
dc.citation.beginningpage991-
dc.citation.endingpage1001-
dc.citation.publicationnamePHYSICS OF PLASMAS-
dc.contributor.localauthorChang, Hong-Young-
dc.contributor.nonIdAuthorUHM, HS-
dc.contributor.nonIdAuthorKIM, JH-
dc.contributor.nonIdAuthorSONG, SK-
dc.type.journalArticleArticle-
dc.subject.keywordPlusLOW-PRESSURE-
dc.subject.keywordPlusBEAM-
dc.subject.keywordPlusMODEL-
dc.subject.keywordPlusIMPLANTATION-
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