마이크로 게이지를 이용한 다결정 실리콘 박막의 열팽창계수의 측정Measurement of Thermal Expansion Coefficient of Poly-Si Thin Film Using Microgauge
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 채정헌 | ko |
| dc.contributor.author | 이재열 | ko |
| dc.contributor.author | 강상원 | ko |
| dc.date.accessioned | 2013-02-27T18:34:09Z | - |
| dc.date.available | 2013-02-27T18:34:09Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-01 | - |
| dc.identifier.citation | 한국재료학회지, v.8, no.1, pp.85 - 91 | - |
| dc.identifier.issn | 1225-0562 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/70130 | - |
| dc.language | Korean | - |
| dc.publisher | 한국재료학회 | - |
| dc.title | 마이크로 게이지를 이용한 다결정 실리콘 박막의 열팽창계수의 측정 | - |
| dc.title.alternative | Measurement of Thermal Expansion Coefficient of Poly-Si Thin Film Using Microgauge | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 8 | - |
| dc.citation.issue | 1 | - |
| dc.citation.beginningpage | 85 | - |
| dc.citation.endingpage | 91 | - |
| dc.citation.publicationname | 한국재료학회지 | - |
| dc.contributor.localauthor | 강상원 | - |
| dc.contributor.nonIdAuthor | 채정헌 | - |
| dc.contributor.nonIdAuthor | 이재열 | - |
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