Browse "College of Engineering(공과대학)" by Subject Extreme-Ultraviolet (EUV) lithography▼aGradient▼aStochastic effect▼aBlock copolymer▼aSelf-assembly▼aPoly (styrene)▼aPoly (pentafluorostyrene)▼a4-(tert-butyldimethylsilyloxy)-styrene▼avertical lamella▼aaspect ratio

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