학위논문(석사) - 한국과학기술원 : 신소재공학과, 2021.2,[iv, 46 p. :]
Extreme-Ultraviolet (EUV) lithography▼aGradient▼aStochastic effect▼aBlock copolymer▼aSelf-assembly▼aPoly (styrene)▼aPoly (pentafluorostyrene)▼a4-(tert-butyldimethylsilyloxy)-styrene▼avertical lamella▼aaspect ratio; EUV 리소그래피▼a농도 구배▼a스토케스틱 현상▼a블록공중합체▼a자기조립▼a폴리(스타이 렌)▼a폴리(펜타플루오로스타이렌)▼a4-(털트-부틸다이메틸실록시)스타이렌▼a수직배향▼a종횡비
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