Browse "College of Engineering(공과대학)" by Author Rha, Sa-Kyun
Showing results 4 to 6 of 6
| Growth studies and characterization of silicon nitride thin films deposited by alternating exposures to Si2Cl6 and NH3 Park, Kwangchol; Yun, Won-Deok; Choi, Byoung-Jun; Kim, Heon-Do; Lee, Won-Jun; Rha, Sa-Kyun; Park, Chong-Ook, THIN SOLID FILMS, v.517, no.14, pp.3975 - 3978, 2009-05 |
| Improved Copper Chemical Vapor Deposition Process by Applying Substrate Bias Park, Chong-Ook; Lee, Won-Jun; Rha, Sa-Kyun; Lee, Seung-Yun; Kim, Dong-Won; Chun, Soung-Soon, 1996 MRS Spring Symposium, v.427, pp.207 - 212, 1996-04-08 |
| The electrical properties of dielectric stacks of SiO2 and Al2O3 prepared by atomic layer deposition method Han, Byeol; Lee, Seung-Won; Park, Kwangchol; Park, Chong-Ook; Rha, Sa-Kyun; Lee, Won-Jun, CURRENT APPLIED PHYSICS, v.12, no.2, pp.434 - 436, 2012-03 |
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