Control of preferred orientation in sol-gel lead-zirconate-titanate film on Pt/Ti/glass substrate

Abstract

The method for controlling the crystal orientation of lead-zirconate-titanate (PZT) thin films has been studied. The PZT thin films were fabricated using sol-gel spin-coating onto Pt/Ti/glass substrates. As the films were heat treated at different temperatures between 270 and 350 degrees C for pyrolysis, we may control the crystal orientations. The firing for the crystallization was done at 650 degrees C using rapid thermal annealing (RTA). The preferred orientation of the PZT thin films was observed using X-ray diffraction analysis (XRD), rocking curves, pole figures, and the microstructure was investigated using scanning electron microscopy (SEM). The preferred orientations in the direction of the (111) plane and (100) plane were obtained using the heat treatment fur pyrolysis at 330 degrees C and 350 degrees C, respectively. (C) 1998 Published by Elsevier Science S.A.