The effects of the composition on the step coverage of SrTiO3 thin films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | No, Kwangsoo | ko |
| dc.date.accessioned | 2013-02-27T17:36:52Z | - |
| dc.date.available | 2013-02-27T17:36:52Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000 | - |
| dc.identifier.citation | ISAF, v.1, pp.59 - 66 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/69880 | - |
| dc.language | Korean | - |
| dc.publisher | 한국요업학회 | - |
| dc.title | The effects of the composition on the step coverage of SrTiO3 thin films | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 1 | - |
| dc.citation.beginningpage | 59 | - |
| dc.citation.endingpage | 66 | - |
| dc.citation.publicationname | ISAF | - |
| dc.contributor.localauthor | No, Kwangsoo | - |
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