백색광 주사 간섭법을 이용한 박막의 두께 형상 측정법Thin Film Thickness Profile Measurement using White Light Scanning Interferometry
- Publisher
- 한국광학회
- Issue Date
- 1999-10
- Language
- Korean
- Citation
한국광학회지, v.10, no.5, pp.373 - 378
- ISSN
- 1225-6285
- Appears in Collection
- ME-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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