백색광 주사 간섭법을 이용한 박막의 두께 형상 측정법Thin Film Thickness Profile Measurement using White Light Scanning Interferometry

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dc.contributor.author김기홍ko
dc.contributor.author김승우ko
dc.date.accessioned2013-02-27T17:17:13Z-
dc.date.available2013-02-27T17:17:13Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1999-10-
dc.identifier.citation한국광학회지, v.10, no.5, pp.373 - 378-
dc.identifier.issn1225-6285-
dc.identifier.urihttp://hdl.handle.net/10203/69787-
dc.languageKorean-
dc.publisher한국광학회-
dc.title백색광 주사 간섭법을 이용한 박막의 두께 형상 측정법-
dc.title.alternativeThin Film Thickness Profile Measurement using White Light Scanning Interferometry-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume10-
dc.citation.issue5-
dc.citation.beginningpage373-
dc.citation.endingpage378-
dc.citation.publicationname한국광학회지-
dc.contributor.localauthor김승우-
dc.contributor.nonIdAuthor김기홍-
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