Effects of La concentration on the texturing and the electrical properties of sol-gel derived PLT thin films

Abstract

Lanthanum doped lead titanate (PLT) thin films consisting of different La concentrations were fabricated on Pt/Ti/SiO2/Si using sol-gel method. The films were dried at 440 degrees C for 5 min and fired at 600 degrees C using rapid thermal annealing (RTA) for 1min. The preferred orientation (texturing) and the morphology of the PLT film were changed with La concentration and a possible cause of the texturing has been discussed. The effects of La doping to the Lead titanate films on the dielectric constants, P-E hysteresis loop and pyroelectric coefficient were measured and discussed.