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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Molybdenum-gate HfO2 CMOS FinFET technology

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Ha, D. / Takeuchi, H. / Choi, Yang-Kyuresearcher / King, T.-J. / Bai, W.P. / Kwong, D.-L. / Agarwal, A. / Ameen, M.
Publisher
IEEE
Issue Date
2004-12-13
Language
ENG
Citation

IEEE International Electron Devices Meeting, 2004 IEDM, pp.643 - 646

ISSN
0163-1918
URI
http://hdl.handle.net/10203/695
Appears in Collection
EE-Conference Papers(학술회의논문)
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