고상 에피택셜 성장에 의한 PtSi 박막의 형성The Formation of Epitaxial PtSi Films on Si(100) by Solid Phase Epitaxy
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최치규 | ko |
| dc.contributor.author | 강민성 | ko |
| dc.contributor.author | 이개명 | ko |
| dc.contributor.author | 김상기 | ko |
| dc.contributor.author | 서경수 | ko |
| dc.contributor.author | 이정용 | ko |
| dc.contributor.author | 김건호 | ko |
| dc.date.accessioned | 2013-02-27T12:01:09Z | - |
| dc.date.available | 2013-02-27T12:01:09Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995-12 | - |
| dc.identifier.citation | 한국진공학회지, v.4, no.3, pp.319 - 326 | - |
| dc.identifier.issn | 1225-8822 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/68450 | - |
| dc.language | Korean | - |
| dc.publisher | 한국진공학회 | - |
| dc.title | 고상 에피택셜 성장에 의한 PtSi 박막의 형성 | - |
| dc.title.alternative | The Formation of Epitaxial PtSi Films on Si(100) by Solid Phase Epitaxy | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 4 | - |
| dc.citation.issue | 3 | - |
| dc.citation.beginningpage | 319 | - |
| dc.citation.endingpage | 326 | - |
| dc.citation.publicationname | 한국진공학회지 | - |
| dc.contributor.localauthor | 이정용 | - |
| dc.contributor.nonIdAuthor | 최치규 | - |
| dc.contributor.nonIdAuthor | 강민성 | - |
| dc.contributor.nonIdAuthor | 이개명 | - |
| dc.contributor.nonIdAuthor | 김상기 | - |
| dc.contributor.nonIdAuthor | 서경수 | - |
| dc.contributor.nonIdAuthor | 김건호 | - |
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