슬릿광 3차원 형상측정에서 측정분해능 최적화를 위한 시스템설계 및 카메라보정

Abstract

This paper presents an enhanced method of slit beam projection intended for the rapid measurement of 3-dimensional surface profiles of dies and molds. Special emphasis is given to optimizing the design of optical system so that the measuring accuracy can be maximized by adopting two-plane camera calibration together with sub-pixel image processing techniques. Finally, several measurement examples are discussed to demonstrate that an actual measuring accuracy of ± 0.2 mm can be achieved over the measuring range of 500 mm{\times}300mm{\times}200mm.$