DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, C | ko |
dc.contributor.author | Yoon, D | ko |
dc.contributor.author | Lee, J | ko |
dc.contributor.author | Choi, C | ko |
dc.contributor.author | No, Kwangsoo | ko |
dc.date.accessioned | 2013-02-27T04:19:28Z | - |
dc.date.available | 2013-02-27T04:19:28Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1994-05 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.33, no.5A, pp.2675 - 2678 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | http://hdl.handle.net/10203/66398 | - |
dc.description.abstract | Lead zirconate titanate (PZT) thin films were fabricated using sol-gel spinning onto Pt/glass, Pt/Ti/glass and Pt/Ti/SiO2/Si substrates and heat-treated using rapid thermal annealing (RTA). The preferred orientation and the perovskite phase content of the PZT thin films were studied using X-ray diffraction analysis (XRD), and the polarization vs electric field (P-E) hysteresis characteristics were investigated using a standardized ferroelectric test system. All of the resulting films on platinized substrate with Ti adhesion layer were well crystallized with the perovskite phase. A preferred (111) orientation was obtained on the Pt/Ti/glass substrate. The saturation polarization of the PZT film on glass substrates was higher than that on Si substrates. | - |
dc.language | English | - |
dc.publisher | JAPAN J APPLIED PHYSICS | - |
dc.title | EFFECTS OF SUBSTRATE AND BOTTOM ELECTRODES ON THE PHASE-FORMATION OF LEAD-ZIRCONATE-TITANATE THIN-FILMS PREPARED BY THE SOL-GEL METHOD | - |
dc.type | Article | - |
dc.identifier.wosid | A1994NU12600047 | - |
dc.type.rims | ART | - |
dc.citation.volume | 33 | - |
dc.citation.issue | 5A | - |
dc.citation.beginningpage | 2675 | - |
dc.citation.endingpage | 2678 | - |
dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS | - |
dc.identifier.doi | 10.1143/JJAP.33.2675 | - |
dc.contributor.localauthor | No, Kwangsoo | - |
dc.contributor.nonIdAuthor | Kim, C | - |
dc.contributor.nonIdAuthor | Yoon, D | - |
dc.contributor.nonIdAuthor | Lee, J | - |
dc.contributor.nonIdAuthor | Choi, C | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | SOL-GEL | - |
dc.subject.keywordAuthor | PZT | - |
dc.subject.keywordAuthor | PT-TI INTERMETALLIC COMPOUNDS | - |
dc.subject.keywordAuthor | BOTTOM ELECTRODE | - |
dc.subject.keywordAuthor | TC | - |
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