Fabrication of 3D Microstructures with single UV Lithography Step

Abstract

This paper presents a novel microfabrication technology of 3D microstructures with inclined/rotated UV lithography using negative photoresist, SU-8. In some cases, reflected UV as well as incident UV is used to form microstructures.Various 3D microstructures are simply fabricated such as embedded channels, bridges, V-grooves, truncated cones, and so on.