Fabrication of 3D Microstructures with single UV Lithography Step

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This paper presents a novel microfabrication technology of 3D microstructures with inclined/rotated UV lithography using negative photoresist, SU-8. In some cases, reflected UV as well as incident UV is used to form microstructures.Various 3D microstructures are simply fabricated such as embedded channels, bridges, V-grooves, truncated cones, and so on.
Publisher
IEEK PUBLICATION CENTER
Issue Date
2002
Language
English
Citation

JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.2, no.4, pp.268 - 272

ISSN
1598-1657
URI
http://hdl.handle.net/10203/6601
Appears in Collection
ME-Journal Papers(저널논문)
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