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High-density silicon microprobe arrays for LCD pixel inspection

Lee, Changyeol; Kim, Yoonhyuk; Choi, Yong-Gie; Cho, Young-Ho; Lee, Kwyro; Kwak, Byung Man, Proceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems, pp.429 - 434, 1996-02-11

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