High-density silicon microprobe arrays for LCD pixel inspection

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Issue Date
1996-02-11
Language
ENG
Citation

Proceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems, pp.429 - 434

URI
http://hdl.handle.net/10203/116851
Appears in Collection
BiS-Conference Papers(학술회의논문)
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