Browse "BiS-Conference Papers(학술회의논문)" by Author Han, KH

Showing results 1 to 2 of 2

1
Design, Fabrication and Uncertainty Evaluation of a Surface-micromachined Capacitive Microaccelerometer

Han, KH; Kim, JP; Cho, Young-Ho, Inter. Mechanical Engineering Congress and Exposition (IMECE '98), ASME, pp.347 - 352, 1998-11-15

2
Self-balanced high-resolution capacitive microaccelerometers using branched finger electrodes with high-amplitude sense voltage

Han, KH; Cho, Young-Ho, 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, pp.714 - 717, 2002-01-20

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