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College of Engineering(공과대학)Dept. of Bio and Brain Engineering(바이오및뇌공학과)BiS-Conference Papers(학술회의논문)

Design, Fabrication and Uncertainty Evaluation of a Surface-micromachined Capacitive Microaccelerometer

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Han, KH / Kim, JP / Cho, Young-Horesearcher
Issue Date
1998-11-15
Language
ENG
Citation

Inter. Mechanical Engineering Congress and Exposition (IMECE '98), ASME, pp.347 - 352

URI
http://hdl.handle.net/10203/120697
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BiS-Conference Papers(학술회의논문)
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