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Measurement of Young's Modulus and Residual Stress in E-Beam Evaporated Aluminum and Thermally Evaporated Chromium Films using Blister Method Moon, HJ; Earmme, Youn-Young; Park, SS; Cho, Young-Ho, Proc. SEM 8th International Congress on Experimental Mechanics and Experimental/Numerical Mechanics in Electronic Packaging, pp.5 - 6, 1996-06-10 |
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